Method for fabricating polycrystalline silicon thin film transistor

ABSTRACT

A thin film transistor device includes a substrate, a buffer layer on the substrate, an active layer on the buffer layer, the active layer is formed of polycrystalline silicon and includes first undoped areas, a second lightly doped area, and third highly doped areas, a gate insulation layer on the buffer layer, a dual-gate electrode on the gate insulation layer including first and second gate electrodes corresponding to the first areas, an interlayer insulator on the gate insulation layer covering the dual-gate electrode, source and drain contact holes exposing the third areas, a gate contact hole penetrating the interlayer insulator to expose a portion of the dual-gate electrode, source and drain electrodes on the interlayer insulator contacting the third areas through the source and drain contact holes, and a third gate electrode on the interlayer insulator contacting the exposed portion of the dual-gate electrode through the gate contact hole.

This application is a Divisional of prior U.S. application Ser. No.10/407,276, filed Apr. 7, 2003 now U.S. Pat. No. 7,002,178.

The present invention claims the benefit of Korean Patent ApplicationNo. 2002-0020467 filed in Korea on Apr. 15, 2002, which is herebyincorporated by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a thin film transistor (TFT) and amethod for fabricating the same, and more particularly, to apolycrystalline silicon thin film transistor (poly-Si TFT) and a methodof fabricating the same that decreases leakage current and improveselectrical characteristics of the TFT.

2. Discussion of the Related Art

In general, a poly-Si TFT has high carrier mobility, decreased photocurrent, and relatively low-level shift voltage in comparison with anamorphous silicon thin film transistor (a-Si TFT). Accordingly, apoly-Si TFT is commonly employed as a switching element in the liquidcrystal display panel to achieve high resolution or in a projectionpanel to achieve high light intensity. Further, a poly-Si TFT can befabricated as both an n-channel TFT and a p-channel TFT to form a CMOScircuit.

In addition, a poly-Si TFT can be fabricated by utilizing currentsemiconductor fabrication processes, because the method for fabricatinga poly-Si TFT is similar to the CMOS process of silicon wafer. Inparticular, an intrinsic amorphous silicon layer is formed on aninsulating substrate by using a Plasma Chemical Vapor Deposition (PCVD)method or a Low Pressure Chemical Vapor Deposition (LPCVD) method. Afterthe amorphous silicon layer has a thickness of about 500 angstroms (Å),it is re-crystallized into a polycrystalline silicon layer using acrystallization method.

The crystallization method is generally classified into one of anExcimer Laser Crystallization (ELC) method, a Solid PhaseCrystallization (SPC) method, a Metal Induced Crystallization (MIC)method, and a Metal Induced Lateral Crystallization (MILC). In the ELCmethod, an insulating substrate having an amorphous silicon layer formedthereon is heated to a temperature of about 250° C. Then, an excimerlaser beam is applied to the amorphous silicon layer to form apolycrystalline silicon layer. In the SPC method, the amorphous siliconlayer is heat-treated at a high temperature for a long time tocrystallize into a polycrystalline silicon layer.

In the MIC method, a metal layer is deposited on the amorphous siliconlayer and the deposited metal is used for crystallization. Here, alarge-sized glass substrate can be used as an insulating substrate. Inthe MILC method, a metal is first formed on the amorphous silicon layer,and then the amorphous silicon layer is crystallized. Also, in the MILCmethod, an oxide pattern is formed on a predetermined active portion ofthe amorphous silicon layer, and the amorphous silicon layer isconverted into polycrystalline silicon by lateral grain growth.

Since the ELC method can be performed at a relatively low temperature oninexpensive glass substrates, the ELC method has been widely used tocovert amorphous silicon into polycrystalline silicon by applying laserenergy to the deposited amorphous silicon. Further, when the ELC methodis used to form TFTs that are adopted as switching elements in an arraysubstrate of a liquid crystal display, the fabricated TFTs becomen-channel TFTs and manipulate liquid crystals by applying voltages tothe liquid crystals.

To have a high display quality in a liquid crystal display, the TFT isrequired to have a sufficiently low OFF current (i.e., a current flowingwhen the TFT is turned OFF). However, the poly-Si TFT has high ON andOFF currents in comparison to an a-Si TFT. Since the carrier mobility ofthe polycrystalline silicon is large. Thus, leakage current increases inan interface between doped source and drain regions and un-doped channelregion.

To solve the problems above, the polycrystalline silicon layer of thepoly-Si TFT has an offset area or a lightly doped region (LDR) in thesource and drain regions. The offset area is an un-doped region of thesource and drain regions and the LDR is a region that impurities of lowconcentration are lightly doped. Additionally, the gate electrode of thepoly-Si TFT has a multiple structure, e.g., a dual structure, todecrease the leakage current.

FIGS. 1A to 1E are cross-sectional views of a polycrystalline siliconthin film transistor according to the related art. In FIG. 1A, a bufferlayer 12 is first formed on a substrate 10. The buffer layer 12 is asilicon insulating material, such as silicon nitride (SiN_(X)) orsilicon oxide (SiO₂), and the buffer layer 12 functions to preventdiffusion of alkali material from the substrate 10 when heat is appliedto the substrate 10. Also, amorphous silicon, such as a-Si:H, isdeposited on the buffer layer 12 to form an amorphous silicon layer 14.Then, the substrate 10 having the amorphous silicon layer 14 is heatedto a temperature of 400 to 500° C. to eliminate hydrogen gas (H₂)included in the amorphous silicon layer 14, wherein the heating processis commonly known as a dehydrogenation process. In FIG. 1B, after thedehydrogenation process, laser beams are applied to the amorphoussilicon layer 14 shown in FIG. 1A, thereby converting the amorphoussilicon layer 14 to a polycrystalline silicon layer 16.

In FIG. 1C, the polycrystalline silicon layer 16 (in FIG. 1B) is thenpatterned into an island shape to form an active layer 18. In addition,a gate insulation layer 20 is deposited on the buffer layer 12 to coverthe active layer 18. The gate insulation layer 20 is an inorganicmaterial, such as silicon nitride (SiN_(X)) or silicon oxide (SiO₂).Further, a conductive metallic material is deposited on the gateinsulation layer 20, and then patterned to form a gate electrode 22 overthe active layer 18. The deposited conductive metallic material may bealuminum (Al), chromium (Cr), molybdenum (Mo), or molybdenum tungsten(MoW). Moreover, the gate electrode 22 can have a double-layeredstructure of molybdenum/aluminum neodymium (Mo/AlNd). A portion of theactive layer 18, which corresponds to the gate electrode 22, is achannel region when the thin film transistor is complete. Alternatively,the gate electrode 22 can be made of polycrystalline silicon. Afterforming the gate electrode 22, a low-density n-type dopant (hereinafterreferred to as a n⁻ ion) is applied to an entire surface of thesubstrate 10. However, the gate electrode 22 functions as a mask, suchthat the active layer 18 is doped by the n⁻ ion except for the portioncorresponding to the gate electrode 22.

In FIG. 1D, a photo resist pattern 23 is formed on the gate insulationlayer 20 to cover the gate electrode 22. Therefore, the doped portion ofthe active layer 18 is considered as divided into a first area A1 and asecond area A2, where the first area A1 is overlapped by the photoresist pattern 23 and the second area A2 is not overlapped by photoresist pattern 23. After forming the photo resist pattern 23, ahigh-density n-type dopant (hereinafter referred to as a n⁺ ion) isapplied to the entire surface of the substrate 10. Then, the first areaA1 of the active layer 18 becomes a lightly doped region (LDR), and thesecond area A2 of the active layer 18 becomes a highly doped region(HDR), thereby forming source and drain regions. Accordingly, thesubstrate 10 includes, on both sides of the gate electrode 22, thesource and drain regions A2 where the high density n-type ions are dopedand the LDRs A1 where the low density n-type ions are doped.

In FIG. 1E, the photo resist pattern 23 (in FIG. 1D) is removed, and apassivation layer 24 is formed on an entire surface of the gateinsulation layer 20 to cover the gate electrode 22. The passivationlayer 24 is an inorganic material, such as silicon nitride (SiN_(X)) orsilicon oxide (SiO₂), or an organic material, such as benzocyclobutene(BCB) or an acrylic resin. Then, the passivation layer 24 and the gateinsulation layer 20 are partially etched to form a source contact hole26 and a drain contact hole 28 exposing the source and drain regions A2,respectively. Thereafter, the source and drain electrodes 30 and 32 areformed on the passivation layer 24, where the source and drainelectrodes 30 and 32 contact the source and drain regions A2,respectively, through the source and drain contact holes 26 and 28.Accordingly, a poly-Si TFT is formed with the LDRs in the source anddrain regions of the active layer and multiple gate electrodes (e.g., adual gate electrode) to more decrease the leakage current. When themultiple gate electrodes are employed in the poly-Si TFT, the LDRs areenlarged and the electric field decreases in the TFT, thereby loweringthe leakage current.

FIGS. 2A to 2D are cross-sectional views of another polycrystallinesilicon thin film transistor having dual gate electrodes according tothe related art. In FIG. 2A, a buffer layer 52 is formed on a substrate50. The buffer layer 52 is a silicon insulating material, such assilicon nitride (SiN_(X)) or silicon oxide (SiO₂). Also, apolycrystalline silicon layer is formed on the buffer layer 52, and thenpatterned to form an island-shaped active layer 54 of polycrystallinesilicon.

In FIG. 2B, a gate insulation layer 56 is formed on the buffer layer 52to cover the active layer 54, and the gate insulation layer 56 is aninorganic material, such as silicon nitride (SiN_(X)) or silicon oxide(SiO₂). After forming the gate insulation layer 56, a dual-gateelectrode 58 is formed on the gate insulation layer 56 over the activelayer 54. The dual-gate electrode 58 includes a first gate electrode 58a and a second gate electrode 58 b, wherein both the first and secondgate electrodes 58 a and 58 b receive the same voltage. Thereafter, then⁻ ion is doped an entire surface of the substrate 50. Thus, the activelayer 54 is doped by the n⁻ ions except the portions overlapped by thefirst and second gate electrodes 58 a and 58 b where the dual-gateelectrode 58 functions as a mask. Further, a portion of the active layer54 between the first and second gate electrodes 58 a and 58 b becomes afirst active area B1, and the outer parts of the active layer 54 whichare doped by the n⁻ ions become second active areas B2.

In FIG. 2C, photo resist patterns 60 a and 60 b are formed on the gateinsulation layer 56 while covering the first and second gate electrodes58 a and 58 b. The first photo resist pattern 60 a covers and surroundsthe first gate electrode 58 a, and the second photo resist pattern 60 bcovers and surrounds the second photo resist pattern 58 b. Since thefirst and second photo resist patterns 60 a and 60 b are not connectedto each other, the first active area B1 is divided into third activeareas B3 that the first and second photo resist patterns 60 a and 60 boverlap and a fifth active area B5 over which the photo resist pattern60 do not exist. Accordingly, each second active area B2 is divided intothe third active area B3 over which the photo resist pattern 60 existsand a fourth active area B4 over which the photo resist pattern 60 doesnot exist.

After forming the photo resist patterns 60 a and 60 b, n⁺ ions, such asphosphorous ions, are applied to the entire surface of the substrate 50.Therefore, the fourth and fifth active areas B4 and B5 become highlydoped regions (HDRs), and the third active areas B3 overlapped by thephoto resist patterns 60 a and 60 b become lightly doped regions (LDRs),thereby forming source and drain regions. After the n⁺ ion doping, thephoto resist patterns 60 a and 60 b are sequentially removed.Accordingly, the active layer 54 includes the LDRs around the dual-gateelectrode 60, and the HDRs around the LDRs.

In FIG. 2D, a passivation layer 62 is formed on the entire surface ofthe gate insulation layer 56 to cover the dual-gate electrode 58. Then,the passivation layer 62 and the gate insulation layer 56 are partiallyetched to form a source contact hole 64 and a drain contact hole 66. Thesource contact hole 64 and the drain contact hole 66 expose the highlydoped source and drain regions B4, respectively. Thereafter, source anddrain electrodes 68 and 70 are formed on the passivation layer 62. Thesource and drain electrodes 68 and 70 contact the source and drainregions B4, respectively, through the source and drain contact holes 64and 66. Accordingly, a polycrystalline silicon thin film transistor isformed having the dual-gate electrode and the LDRs in the active layer.

However, when forming the photo resist pattern for the LDRs according tothe related art, the photo resist pattern may be misaligned due tofabrication errors. As a result, the LDRs disposed on both sides of thegate electrode may have different sizes. If the LDRs are disposedasymmetrically in the active layer, the poly-Si TFT may have an unstableand swaying threshold voltage.

SUMMARY OF THE INVENTION

Accordingly, the present invention is directed to a polycrystallinesilicon thin film transistor and a method of fabricating the same thatsubstantially obviates one or more problems due to limitations anddisadvantages of the related art.

An object of the present invention is to provide a polycrystallinesilicon thin film transistor having a multiple gate electrode and amethod of fabricating the same to reduce leakage current.

Another object of the present invention is to provide a polycrystallinesilicon thin film transistor having symmetrically disposed LDRs (lightlydoped regions) therein and a method of fabricating the same to obtainoptimized operation characteristics.

Additional features and advantages of the invention will be set forth inthe description which follows, and in part will be apparent from thedescription, or may be learned by practice of the invention. Theobjectives and other advantages of the invention will be realized andattained by the structure particularly pointed out in the writtendescription and claims hereof as well as the appended drawings.

To achieve these and other advantages and in accordance with the purposeof the present invention, as embodied and broadly described, a thin filmtransistor device, includes a substrate, a buffer layer on thesubstrate, an island-shaped active layer on the buffer layer, theisland-shaped active layer is formed of polycrystalline silicon andincludes first undoped areas, a second lightly doped area, and thirdhighly doped areas, a gate insulation layer on the buffer layer andcovering the island-shaped active layer, a dual-gate electrode on thegate insulation layer and including first and second gate electrodescorresponding to the first undoped areas, an interlayer insulator formedon the gate insulation layer and covering the dual-gate electrode,source and drain contact holes penetrating the interlayer insulator andthe gate insulation layer to expose the third highly doped areas, a gatecontact hole penetrating the interlayer insulator to expose a portion ofthe dual-gate electrode, source and drain electrodes formed on theinterlayer insulator and contacting the third highly doped areas throughthe source and drain contact holes, and a third gate electrode formed onthe interlayer insulator and contacting the exposed portion of thedual-gate electrode through the gate contact hole.

In another aspect, a method for fabricating a thin film transistordevice includes the steps of: forming a buffer layer on a substrate,forming an island-shaped polycrystalline silicon active layer on thebuffer layer to include first, second, and third areas, forming a gateinsulation layer on the buffer layer to cover the island-shapedpolycrystalline silicon active layer, forming a dual-gate electrode onthe gate insulation layer to correspond to the first area of theisland-shaped polycrystalline silicon active layer, the dual-gateelectrode includes a first gate electrode and a second gate electrode,forming a photo resist pattern on a portion of the gate insulation layerbetween the first and second gate electrodes, to partially overlapportions of the first and second gate electrodes, removing the photoresist pattern from the gate insulation layer and the first and secondgate electrodes, forming an interlayer insulator on the gate insulationlayer to cover the first and second gate electrodes, forming a gatecontact hole to expose a portion of the dual-gate electrode by partiallyetching the interlayer insulator, forming source and drain contact holesto penetrate both the interlayer insulator and the gate insulation layerto expose the third areas of the island-shaped polycrystalline siliconactive layer, and forming source and drain electrodes and a third gateelectrode on the interlayer insulator, wherein the source and drainelectrodes contact the third areas of the polycrystalline silicon activelayer through the source and drain contact holes, and the third gateelectrode contacts the exposed portion of the dual-gate electrodethrough the gate contact hole.

In another aspect, a method for fabricating a thin film transistordevice includes the steps of: forming a buffer layer on a substrate,forming an island-shaped polycrystalline silicon active layer on thebuffer layer to include first, second, and third areas, forming a gateinsulation layer on the buffer layer to cover the island-shapedpolycrystalline silicon active layer, forming a dual-gate electrode onthe gate insulation layer to correspond with the first area, thedual-gate electrode includes a first gate electrode and a second gateelectrode, forming a photo resist pattern on a portion of the gateinsulation layer between the first and second gate electrodes to fullycover the first and second gate electrodes, fill a space between thefirst and second gate electrodes, and partially overlap the third areas,removing the photo resist pattern from the gate insulation layer and thefirst and second gate electrodes, forming an interlayer insulator on thegate insulation layer to cover the first and second gate electrodes,forming gate contact holes to expose a portion of the dual-gateelectrode by partially etching the interlayer insulator, forming sourceand drain contact holes to penetrate both the interlayer insulator andthe gate insulation layer to expose the third areas, and forming sourceand drain electrodes and a third gate electrode on the interlayerinsulator, wherein the source and drain electrodes contact the thirdareas of the polycrystalline silicon active layer through the source anddrain contact holes, and the third gate electrode contacts the exposedportion of the dual-gate electrode through the gate contact hole.

It is to be understood that both the foregoing general description andthe following detailed description are exemplary and explanatory and areintended to provide further explanation of the invention as claimed.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings, which are included to provide a furtherunderstanding of the invention and are incorporated in and constitute apart of this application, illustrate embodiments of the invention andtogether with the description serve to explain the principle of theinvention. In the drawings:

FIGS. 1A to 1E are cross-sectional views of a polycrystalline siliconthin film transistor according to the related art;

FIGS. 2A to 2D are cross-sectional views of another polycrystallinesilicon thin film transistor having dual gate electrodes according tothe related art;

FIGS. 3A to 3D are cross-sectional views of an exemplary polycrystallinesilicon thin film transistor according to the present invention;

FIG. 4 is a plan view of a pixel of an array substrate having anexemplary polycrystalline silicon thin film transistor according to thepresent invention;

FIG. 5 is a cross-sectional view taken V–V′ of FIG. 4;

FIGS. 6 and 7 are circuit diagrams of exemplary polycrystalline siliconthin film transistors according to the present invention;

FIGS. 8A and 8B are cross-sectional views of another exemplarypolycrystalline silicon thin film according to the present invention;

FIGS. 9A to 9D are cross-sectional views of another exemplarypolycrystalline silicon thin film according to the present invention;

FIG. 10 is a cross-sectional view of an array substrate implementing theexemplary polycrystalline silicon thin film transistor of FIGS. 9A–9D;and

FIGS. 11A and 11B are cross-sectional views of another exemplarypolycrystalline silicon thin film according to the present invention.

DETAILED DESCRIPTION OF THE INVENTION

Reference will now be made in detail to the preferred embodiments of thepresent invention, examples of which are illustrated in the accompanyingdrawings.

FIGS. 3A to 3D are cross-sectional views of an exemplary polycrystallinesilicon thin film transistor according to the present invention. In FIG.3A, a buffer layer 102 may be formed on a substrate 100. The bufferlayer 102 may be a silicon insulating material, such as silicon nitride(SiN_(X)) or silicon oxide (SiO₂). Also, a polycrystalline silicon layermay be formed on the buffer layer 102, and may be subsequently patternedto form an island-shaped polycrystalline silicon active layer 104. Forexample, the polycrystalline silicon active layer 104 may be formed byapplying a dehydrogenation method on an amorphous silicon layer and thenconverting the amorphous silicon layer into a polycrystalline siliconlayer by a laser crystallization method. Further, a buffer layer 102 mayfunction to prevent diffusion of alkali materials from the substrate 100into the polycrystalline silicon active layer 104 when heat is appliedto the substrate 100.

In FIG. 3B, a gate insulation layer 106 may be formed over an entiresurface of the buffer layer 102 to cover the active layer 104. The gateinsulation layer 106 may be an inorganic material, such as siliconnitride (SiN_(X)) or silicon oxide (SiO₂). In addition, a dual-gateelectrode having first and second gate electrodes 108 a and 108 b may beformed on the gate insulation layer 106 above portions of the activelayer 104. A distance between the first and second gate electrodes 108 aand 108 b may be within a range from about 0.5 to 5 micrometers.Further, both first and second gate electrodes 108 a and 108 b may bedesigned to receive the same voltage from a gate line upon thecompletion of the TFT. Moreover, an n⁻ ion doping may be performed onthe substrate 100, such that a low-density n-type dopant (e.g.,phosphorous ions) may be introduced into exposed portions of the activelayer 104 which are not overlapped by the first and second gateelectrodes 108 a and 108 b. For example, the dual-gate electrode 108 mayfunction as a mask, such that the active layer 104 may be doped by then⁻ ions except the portions overlapped by the first and second gateelectrodes 108 a and 108 b. Accordingly, a portion of the active layer104, which is disposed between the first and second gate electrodes 108a and 108 b and doped by the n⁻ ions, may become a first active area C1,and the other portions of the active layer 104, which are also doped bythe n⁻ ions, may become second active areas C2.

In FIG. 3C, a photo resist pattern 110 may be formed directly above thefirst active area C1 of the active layer 104. More specifically, thephoto resist pattern 110 may be formed on a portion of the gateinsulation layer 106 between the first and second gate electrodes 108 aand 108 b and on portions of the first and second gate electrodes 108 aand 108 b. In addition, the photo resist pattern 110 may fill a spacebetween the first and second gate electrodes 108 a and 108 b and may notcover entire surfaces of the first and second gate electrodes 108 a and108 b.

Further, an n⁺ ion doping may be performed on the substrate 100, suchthat a high-density n-type dopant (e.g., high-density phosphorous ions)may be introduced into exposed portions of the active layer 104.Accordingly, the first active area C1 may remain as a lightly dopedregion (LDR), and the second active areas C2 may be converted intohighly doped regions (HDRs), thereby forming source and drain regions inthe substrate 100. Thus, the active layer 104 may include the LDR inbetween the first and second gate electrodes 108 a and 108 b, and theHDRs on both outer sides of the dual-gate electrode 108.

Moreover, the portions of the active layer 104 corresponding to thefirst and second gate electrodes 108 a and 108 b may be an activechannel having a channel length L. In addition, the active channelcorresponding to each gate electrode 108 a or 108 b may have a channellength L/2. Accordingly, if the photo resist pattern 110 overlaps a halfof each gate electrode 108 a or 108 b, the photo resist pattern 110 mayhave a process margin of a one-quarter channel length L/4. Thus, evenwhen errors occur during fabrication processing, such as a misalignmentof the photo resist pattern 110, the active area C1 may be shielded bythe photo resist pattern 110 to avoid formation of any partial or unevenhighly doped regions. Furthermore, since the active area C1 may beisolated from the source and drain regions C2, the operatingcharacteristics of the TFT are improved and optimum operation of the TFTis obtained.

In FIG. 3D, the photo resist pattern 110 (in FIG. 3C) may be removed,and an interlayer insulator 112 may be formed on an entire surface ofthe gate insulation layer 106 to cover the dual-gate electrode 108.Then, the interlayer insulator 112 and the gate insulation layer 106 maybe partially etched to form both a source contact hole 113 a and a draincontact hole 113 b. Also, a gate contact hole 125 (in FIG. 4) may besimultaneously formed when forming the source and drain contact holes113 a and 113 b. The source contact hole 113 a and the drain contacthole 113 b may expose portions the source and drain regions C2,respectively, and the gate contact hole may expose portions of the firstand second gate electrodes 108 a and 108 b.

In addition, the source and drain electrodes 114 and 116 may be formedon the interlayer insulator 112. The source and drain electrodes 114 and116 may contact the source and drain regions C2, respectively, throughthe source and drain contact holes 113 a and 113 b. Moreover, whenforming the source and drain electrodes 114 and 116, a third gateelectrode 118 may also be formed between the source and drain electrodes114 and 116 on the interlayer insulator 112. Using the same material asthe source and drain electrodes 114 and 116, the third gate electrode118 may be additionally formed over the active layer 104. In particular,the third gate electrode 118 may be disposed directly above the firstactive area C1 and over the first and second gate electrodes 108 a and108 b. Accordingly, upon the completion of the TFT, when third gateelectrode 118 may be turned ON, the third gate electrode 118 minimizesthe resistance of the first active area C1, thereby improving ON-currentof the TFT.

FIG. 4 is a plan view of a pixel of an array substrate having anexemplary polycrystalline silicon thin film transistor according to thepresent invention, and FIG. 5 is a cross-sectional view taken V–V′ ofFIG. 4. In FIG. 4, a gate line 121 may be disposed along a transversedirection and a data line 115 may be disposed along a longitudinaldirection. The data line 115 may perpendicularly cross the gate line121, thereby defining a pixel region P. A polycrystalline silicon thinfilm transistor T may be disposed at the intersection of the gate anddata lines 121 and 115. In the pixel region P, a pixel electrode 124 maybe formed contacting the poly-Si TFT T through a contact hole 122.

In addition, the poly-Si TFT T may include first and second gateelectrodes 108 a and 108 b extending from the gate line 121, and asource electrode 114 extending from the data line 115. The first andsecond gate electrodes 108 a and 108 b may form a U-shape, such that afirst branch forms the first gate electrode 108 a and a second branchforms the second gate electrode 108 b. Moreover, the poly-Si TFT T mayinclude a third gate electrode 118 contacting the gate line 121.Accordingly, the first, second and third gate electrodes 108 a, 108 band 118 may receive the same gate signal from the gate line 121 througha gate contact hole 125.

In FIG. 5, a passivation layer 120 may be formed over an entire surfaceof the substrate 100. Thereafter, the passivation layer 120 may bepartially etched to form the contact hole 122 that exposes a portion ofthe drain electrode 116. Then, a transparent conductive material may beformed on the passivation layer 120, and patterned to form the pixelelectrode 124 in the pixel region P (in FIG. 4). The pixel electrode 124may contact the drain electrode 116 through the contact hole 122, suchthat the pixel electrode 124 electrically communicates with the poly-SiTFT T.

FIGS. 6 and 7 are circuit diagrams of exemplary polycrystalline siliconthin film transistors according to the present invention. In FIG. 6, apoly-Si TFT may have first, second, and third gate electrodes 108 a, 108b, and 118 electrically connected to one another, such that the samesignal voltage is simultaneously applied to the first, second, and thirdgate electrodes 108 a, 108 b and 118. In FIG. 7, the poly-Si TFT mayalternatively have the third gate electrode 118 independently formed toseparately receive signal voltages from a gate line. The same ordifferent signal voltages may be applied to the first and second gateelectrodes 108 a and 108 b.

FIGS. 8A and 8B are cross-sectional views of another exemplarypolycrystalline silicon thin film according to the present invention. InFIG. 8A, a buffer layer 102 may be formed on a substrate 100, and anisland-shaped active layer 104 may be formed on the buffer layer 102. Agate insulation layer 106 may also be formed on the buffer layer 102covering the active layer 104. Further, first and second gate electrodes108 a and 108 b may be formed on the gate insulation layer 106, directlyabove portions of the active layer 104, and a photo resist pattern 110may be formed on a portion of the gate insulation layer 106 between thefirst and second gate electrodes 108 a and 108 b. Moreover, the photoresist pattern 110 may overlap portions of the first and second gateelectrodes 108 a and 108 b. Thereafter, n⁺ ion doping may be performedon the substrate 100, such that portions of the active layer 104, whichare not shielded by the first and second gate electrodes 108 a and 108 band the photo resist pattern 110, are doped by the n⁺ ions. Accordingly,a first active area D1 between the first and second gate electrodes 108a and 108 b may remain as an un-doped region, and second regions D2along outer portions of the active layer 104 may become highly dopedregions (HDRs).

In FIG. 8B, the photo resist pattern 110 (in FIG. 8A) may be removed,and then n ions may be introduced into an entire surface of thesubstrate 100. Accordingly, the first active area D1 of the active layer104 may become a lightly doped region (LDR), and the second active areasD2 may remain as the highly doped regions (HDRs). Subsequently, thesubstrate 100 may undergo processing shown in FIG. 3D, for example.Since the high-density ion doping process is performed before thelow-density ion doping process, the source and drain regions (i.e., thesecond active areas D2) may be first formed, and then the lightly dopedfirst active area D1 may be formed between the first and second gateelectrodes 108 a and 108 b.

FIGS. 9A to 9D are cross-sectional views of another exemplarypolycrystalline silicon thin film according to the present invention. InFIG. 9A, a buffer layer 202 may be formed on a substrate 200. The bufferlayer 202 may include a silicon insulating material, such as siliconnitride (SiN_(X)) or silicon oxide (SiO₂). Then, a polycrystallinesilicon layer may be formed on the buffer layer 202, and patterned toform an island-shaped polycrystalline silicon active layer 204. Forexample, the polycrystalline silicon active layer 204 may be formed byapplying a dehydrogenation method on an amorphous silicon layer and thenconverting the amorphous silicon layer into a polycrystalline siliconlayer by a laser crystallization method. In addition, the buffer layer202 may function to prevent diffusion of alkali materials from thesubstrate 200 into the polycrystalline silicon active layer 204 whenheat is applied to the substrate 200.

In FIG. 9B, a gate insulation layer 206 may be formed over an entiresurface of the buffer layer 202 to cover the active layer 204. The gateinsulation layer 206 may be an inorganic material, such as siliconnitride (SiN_(X)) or silicon oxide (SiO₂). Then, first and second gateelectrodes 208 a and 208 b may be formed on the gate insulation layer206 directly above the active layer 204. A distance between the firstand second gate electrodes 208 a and 208 b may be within a range fromabout 0.5 to 5 micrometers. Further, the first and second gate electrode208 a and 208 b may receive the same voltage from a gate line. Inaddition, an n⁻ ion doping may be performed on an entire surface of thesubstrate 200, such that the low-density n-type ions, (e.g., phosphorousions) may be introduced into exposed portions of the active layer 204that are not overlapped by the first and second gate electrodes 208 aand 208 b. In particular, since the first and second gate electrodes 208a and 208 b may function as a mask, the active layer 204 may be doped bythe low-density n-type ions except where overlapped by the first andsecond gate electrodes 208 a and 208 b. Further, a portion of the activelayer 204, which is disposed between the first and second gateelectrodes 208 a and 208 b and doped by the n⁻ ions, may become a firstactive area E1, and outer portions of the active layer 204, which arealso doped by the n⁻ ions, become second active areas E2.

In FIG. 9C, a photo resist pattern 210 may be formed on the gateinsulation layer 206 directly above the active layer 204. In particular,the photo resist pattern 210 may fully cover the first and second gateelectrodes 208 a and 208 b, such that the photo resist pattern 210 maybe formed directly above the entire first active area E1 and portions ofthe second active areas E2. In addition, the photo resist pattern 210may fill a space between the first and second gate electrodes 208 a and208 b, and may be formed on lateral portions of the gate insulationlayer adjacent to the first and second gate electrodes 208 a and 208 b.After forming the photo resist pattern 210, n⁺ ions (i.e., ahigh-density n-type impurities) may be introduced into the entiresurface of the substrate 200. Accordingly, the second active areas E2may be divided into third and fourth active areas E3 and E4. The thirdactive area E3 may be overlapped by the photo resist pattern 210,wherein the n⁺ ions are not introduced. The fourth area E4 may beoverlapped by the photo resist pattern 210, wherein the n⁺ ions areintroduced. For instance, the first and third active areas E1 and E3that are shielded by the photo resist pattern 210 may become the lightlydoped regions (LDRs), and the fourth active areas E4 that are notshielded by the photo resist pattern 210 may become the highly dopedregions (HDRs), thereby forming source and drain regions. Thus, theactive layer 204 may include the LDRs between the first and second gateelectrodes 208 a and 208 b and around the dual-gate electrode 208, andmay further include the HDRs around the outer parts of the LDRs.

In FIG. 9D, the photo resist pattern 210 (in FIG. 9C) may be removed,and an interlayer insulator 212 may be formed on the entire surface ofthe gate insulation layer 206 to cover the dual-gate electrode 208.Then, the interlayer insulator 212 and the gate insulation layer 206 maybe partially etched to form both a source contact hole 214 and a draincontact hole 216. In addition, a gate contact hole (125 in FIG. 4) thatpenetrates the interlayer insulator 212 to the dual-gate electrode 208may be simultaneously formed when forming the source and drain contactholes 214 and 216. The source contact hole 214 and the drain contacthole 216 may expose the highly doped source and drain regions E4, andthe gate contact hole (125 in FIG. 4) may expose portions of the firstand second gate electrodes 208 a and 208 b.

In addition, the source and drain electrodes 218 and 220 may be formedon the interlayer insulator 212. The source and drain electrodes 218 and220 may contact the source and drain regions E4 through the source anddrain contact holes 214 and 216. Moreover, when forming the source anddrain electrodes 218 and 220, a third gate electrode 222 may also beformed between the source and drain electrodes 218 and 220 on theinterlayer insulator 212. Using the same material as the source anddrain electrodes 218 and 220, the third gate electrode 222 may beadditionally formed over the active layer 204. In particular, the thirdgate electrode 222 may be disposed directly above the first and thirdactive areas E1 and E3 and over the dual-gate electrode 208.Accordingly, when third gate electrode 222 is turned ON, the third gateelectrode 222 would minimize resistance of the first and third activeareas E1 and E3, thereby improving ON-current of the poly-Si TFT.

FIG. 10 is a cross-sectional view of an array substrate implementing theexemplary polycrystalline silicon thin film transistor of FIGS. 9A–9D.In FIG. 10, a passivation layer 224 may be formed over the substrate 200to cover and protect the poly-Si TFT. In addition, the passivation layer224 may be partially etched to form a contact hole 226 that exposes aportion of the drain electrode 220. Next, a transparent conductivematerial may be deposited on the passivation layer 224, and thenpatterned to form a pixel electrode 228. The pixel electrode 228 maycontact the drain electrode 220 through the contact hole 226 thatpenetrates the passivation layer 224.

FIGS. 11A and 11B are cross-sectional views of another exemplarypolycrystalline silicon thin film according to the present invention. InFIG. 11A, a buffer layer 202 may be formed on a substrate 200, and anisland-shaped active layer 204 may be formed on the buffer layer 202. Agate insulation layer 206 may be formed on the buffer layer 202 coveringthe active layer 204, and first and second gate electrodes 208 a and 208b may be formed on the gate insulation layer 206 over the active layer204. In addition, a photo resist pattern 210 may be formed on portionsof the gate insulation layer 206 directly above the active layer 204 tofully cover the first and second gate electrodes 208 a and 208 b. Inparticular, the photo resist pattern 210 may be formed directly above afirst active area F1 filling up a space between the first and secondgate electrodes 208 a and 208 b, and directly above a second active areaF2.

Moreover, n⁺ ion doping may be performed on an entire surface of thesubstrate 200. Accordingly, portions of the active layer 204, which arenot shielded by the first and second gate electrodes 208 a and 208 b andphoto resist pattern 210, may be doped by the n⁺ ions, thereby definingthird active areas F3. The first active area F1 between the first andsecond gate electrodes 208 a and 208 b and the second areas F2 that areshielded by the photo resist 210 may remain un-doped regions. Moreover,the third active areas F3, which is not overlapped by the photo resistpattern 210 and doped by the n⁺ ions, may become the highly dopedregions (HDRs).

In FIG. 11B, the photo resist pattern 210 (in FIG. 11A) may be removed,and the n⁻ ions may be introduced into the entire surface of thesubstrate 200. Accordingly, the first and second active areas F1 and F2of the active layer 204 may become the lightly doped regions (LDRs), andthe third active areas F3 may remain as the highly doped regions (HDRs),such that the third active areas F3 may become the source and drainregions. Thus, the source and drain regions (i.e., the highly dopedthird active areas F3) may be formed first and then the lightly dopedfirst and second active areas F1 and F2 may be formed between the firstand second gate electrodes 208 a and 208 b and next to the first andsecond gate electrodes 208 a and 208 b.

Although the present invention discloses the n-type ions throughout thespecification, p-type ions can be utilized instead of the n-type ions.

It will be apparent to those skilled in the art that variousmodifications and variations can be made in the polycrystalline siliconthin film transistor and the method of fabricating the same of thepresent invention without departing from the spirit or scope of theinvention. Thus, it is intended that the present invention cover themodifications and variations of this invention provided they come withinthe scope of the appended claims and their equivalents.

1. A method for fabricating a thin film transistor device, comprisingthe steps of: forming a buffer layer on a substrate; forming anisland-shaped polycrystalline silicon active layer on the buffer layerto include first, second, and third areas; forming a gate insulationlayer on the buffer layer to cover the island-shaped polycrystallinesilicon active layer; forming a dual-gate electrode on the gateinsulation layer to correspond to the first areas of the island-shapedpolycrystalline silicon active layer, the dual-gate electrode includes afirst gate electrode and a second gate electrode; forming a photo resistpattern completely covering a portion of the gate insulation layerbetween the first and second gate electrodes; removing the photo resistpattern from the gate insulation layer and the first and second gateelectrodes; forming an interlayer insulator on the gate insulation layerto cover the first and second gate electrodes; forming a gate contacthole to expose a portion of the dual-gate electrode by partially etchingthe interlayer insulator; forming source and drain contact holes topenetrate both the interlayer insulator and the gate insulation layer toexpose the third areas of the island-shaped polycrystalline siliconactive layer; and forming source and drain electrodes and a third gateelectrode on the interlayer insulator, wherein the source and drainelectrodes contact the third areas of the polycrystalline silicon activelayer through the source and drain contact holes, and the third gateelectrode contacts the exposed portion of the dual-gate electrodethrough the gate contact hole.
 2. The method according to claim 1,wherein the photo resist pattern partially overlaps portions of thefirst and second gate electrodes.
 3. The method according to claim 1,wherein the photo resist pattern has a T-shape.
 4. The method accordingto claim 1, further comprising a step of introducing one of low-densityn-type and p-type ions into an entire surface of the substrate after thestep of forming the dual-gate electrode and before the step of formingthe photo resist pattern.
 5. The method according to claim 4, whereinthe step of introducing one of the low-density n-type and p-type ionsforms a lightly doped region in the second area disposed between thefirst and second gate electrodes.
 6. The method according to claim 5,wherein the second area is a unique area where only one of the lowdensity n-type and p-type ions is doped.
 7. The method according toclaim 5, further comprising a step of introducing one of high-densityn-type and p-type ions into the entire surface of the substrate afterthe step of forming the photo resist pattern and before the step ofremoving the photo resist pattern.
 8. The method according to claim 7,wherein the step of introducing one of the high-density n-type andp-type ions forms highly doped regions in the third areas of thepolycrystalline silicon active layer.
 9. The method according to claim8, wherein the third areas are unique areas where only one of thehigh-density n-type and p-type ions is doped.
 10. The method accordingto claim 8, wherein the low-density and high-density n-type ions includephosphorous ions.
 11. The method according to claim 10, wherein thethird gate electrode overlaps the lightly doped region.
 12. The methodaccording to claim 1, further comprising a step of introducing one ofhigh-density n-type and p-type ions into an entire surface of thesubstrate after the step of forming the photo resist pattern and beforethe step of removing the photo resist pattern.
 13. The method accordingto claim 12, wherein the step of introducing one of the high-densityn-type and p-type ions forms highly doped regions in the third areas ofthe polycrystalline silicon active layer.
 14. The method according toclaim 13, wherein the third areas are unique areas where only one of thehigh-density n-type and p-type ions is doped.
 15. The method accordingto claim 13, further comprising a step of introducing one of low-densityn-type and p-type ions into the entire surface of the substrate afterthe step of removing the photo resist pattern and before the step offorming interlayer insulator.
 16. The method according to claim 15,wherein the step of introducing one of the low-density n-type and p-typeions forms a lightly doped region in the second area disposed betweenthe first and second gate electrodes.
 17. The method according to claim16, wherein the second area is a unique area where only one of thelow-density n-type and p-type ions is doped.
 18. The method according toclaim 16, wherein the low-density and high-density n-type ions includephosphorous ions.
 19. The method according to claim 18, wherein thethird gate electrode overlaps the lightly doped region.
 20. The methodaccording to claim 1, wherein the first areas corresponding to thedual-gate electrode form channel regions.
 21. The method according toclaim 1, wherein the third gate electrode includes a same material asthe source and drain electrodes.
 22. The method according to claim 1,wherein the first, second, and third gate electrodes electricallycommunicate with a common gate line and receive a same signal voltagefrom the common gate line.
 23. The method according to claim 1, whereinthe dual-gate electrode has a U-shape with a first branch that includesthe first gate electrode and a second branch that includes the secondgate electrode.
 24. The method according to claim 1, wherein a distancebetween the first and second gate electrodes is within a range of about0.5 to 5 micrometers.
 25. The method according to claim 1, wherein thebuffer layer, the gate insulation layer, and the interlayer insulatorinclude silicon-based insulating materials.
 26. The method according toclaim 25, wherein the silicon-based insulating materials include one ofsilicon oxide and silicon nitride.
 27. A method for fabricating a thinfilm transistor device, comprising the steps of: forming a buffer layeron a substrate; forming an island-shaped polycrystalline silicon activelayer on the buffer layer to include first, second, and third areas;forming a gate insulation layer on the buffer layer to cover theisland-shaped polycrystalline silicon active layer; forming a dual-gateelectrode on the gate insulation layer to correspond with the firstareas, the dual-gate electrode includes a first gate electrode and asecond gate electrode; forming a photo resist pattern on a portion ofthe gate insulation layer between the first and second gate electrodesto fully cover the first and second gate electrodes, fill a spacebetween the first and second gate electrodes, and partially overlap thethird areas; removing the photo resist pattern from the gate insulationlayer and the first and second gate electrodes; forming an interlayerinsulator on the gate insulation layer to cover the first and secondgate electrodes; forming gate contact holes to expose a portion of thedual-gate electrode by partially etching the interlayer insulator;forming source and drain contact holes to penetrate both the interlayerinsulator and the gate insulation layer to expose the third areas; andforming source and drain electrodes and a third gate electrode on theinterlayer insulator, wherein the source and drain electrodes contactthe third areas of the polycrystalline silicon active layer through thesource and drain contact holes, and the third gate electrode contactsthe exposed portion of the dual-gate electrode through the gate contacthole.
 28. The method according to claim 27, further comprising a step ofintroducing one of low-density n-type and p-type ions into an entiresurface of the substrate after the step of forming the dual-gateelectrode and before the step of forming the photo resist pattern. 29.The method according to claim 28, wherein the step of introducing one ofthe low-density n-type and p-type ions forms lightly doped regions inthe second area disposed between the first and second gate electrodesand in the third areas along outer parts of the polycrystalline siliconactive layer not shielded by the first and second gate electrodes. 30.The method according to claim 29, further comprising a step ofintroducing one of high-density n-type and p-type ions into the entiresurface of the substrate after the step of forming the photo resistpattern and before the step of removing the photo resist pattern. 31.The method according to claim 30, wherein the step of introducing one ofthe high-density n-type and p-type ions forms highly doped regions inportions of the third areas which are not overlapped by the photo resistpattern.
 32. The method according to claim 31, wherein the low-densityand high-density n-type ions include phosphorous ions.
 33. The methodaccording to claim 32, wherein the third gate electrode overlaps thelightly doped regions.
 34. The method according to claim 27, furthercomprising a step of introducing one of high-density n-type and p-typeions into an entire surface of the substrate after the step of formingthe photo resist pattern and before the step of removing the photoresist pattern.
 35. The method according to claim 34, wherein the stepof introducing one of the high-density n-type and p-type ions formshighly doped regions in portions of the third areas which are notoverlapped by the photo resist pattern.
 36. The method according toclaim 35, further comprising a step of introducing one of low-densityn-type and p-type ions into the entire surface of the substrate afterthe step of removing the photo resist pattern and before the step offorming interlayer insulator.
 37. The method according to claim 36,wherein the step of introducing one of the low-density n-type and p-typeions forms lightly doped regions in the second area disposed between thefirst and second gate electrodes and in the third areas along outerparts of the polycrystalline silicon active layer not shielded by thefirst and second gate electrodes.
 38. The method according to claim 37,wherein the low-density and high-density n-type ions include phosphorousions.
 39. The method according to claim 38, wherein the third gateelectrode overlaps the lightly doped regions.
 40. The method accordingto claim 27, wherein the first areas corresponding to the dual-gateelectrode form channel regions.
 41. The method according to claim 27,wherein the third gate electrode includes a same material as the sourceand drain electrodes.
 42. The method according to claim 27, wherein thefirst, second, and third gate electrodes electrically communicate with acommon gate line and receive a same signal voltage from the common gateline.
 43. The method according to claim 27, wherein the dual-gateelectrode has a U-shape with a first branch that includes the first gateelectrode and a second branch that includes the second gate electrode.44. The method according to claim 27, wherein a distance between thefirst and second gate electrodes is within a range of about 0.5 to 5micrometers.
 45. The method according to claim 27, wherein the bufferlayer, the gate insulation layer, and the interlayer insulator includesilicon-based insulating materials.
 46. The method according to claim45, wherein the silicon-based insulating materials include one ofsilicon oxide and silicon nitride.